¸®¾ó ŸÀÓ ¸¶ÀÌÅ©·ÎÆ÷Ä¿½º x-ray È»ó ½Ã½ºÅÛÀº
÷´ÜÀÇ ºñÆı« °Ë»ç ¹æ¹ý Áß Çϳª·Î °¢±¤À» ¹Þ°í ÀÖ´Ù. ÀÌ ½Ã½ºÅÛÀ»
»ç¿ëÇÏ¿© ¸ðµç ±Ý¼Ó, Çöó½ºÆ½ ¹× ¼¼¶ó¹Í ÆÐÅ°Áö¿¡ ÀÖ´Â voiding,
porosity, IC die ±×¸®°í Wire bonding, internal seals, solder joint¿Í °°ÀÌ ¼û¾î
Àְųª ¹¯ÇôÁø Ư¡µéÀ» ºÐ¼®ÇÒ ¼ö ÀÖ´Ù.
Benchtop ¸ðµ¨Àº ¿Ïº®ÇÑ Â÷Æó ½Ã¼³À» °®Ãß°í ÀÖÀ¸¸ç ¿¬¼Ó »ç¿ë¿¡µµ
¾ÈÀüÇϵµ·Ï Á¦À۵Ǿú´Ù. ƯÈ÷ BenchtopÀº ¾à°£ÀÇ ±³À°À¸·Î ½±°Ô
»ç¿ëÇÒ ¼ö ÀÖµµ·Ï µðÀÚÀÎ µÇ¾ú´Ù.
°Ë»çÇÏ°íÀÚ ÇÏ´Â ¹°Ã¼¸¦ x-ray source¿Í detector »çÀÌ¿¡ ÀÖ´Â sample
manipulator¿¡ ³õÀº ÈÄ µµ¾î¸¦ ´ÝÀº ´ÙÀ½ ½ºÀ§Ä¡¸¦ ³Ö´Â´Ù. »ùÇÃÀ»
Åë°úÇÑ x-ray´Â image intensifier(È»ó Áõ° ÀåÄ¡)ÀÇ scintillator (x-ray°¡
Á¶»çµÇ¸é ¹ß±¤ÇÏ´Â ¹°Áú) plate¿¡ µµ´ÞÇÏ°Ô µÇ°í ÀÌ °¡½Ã±¤¼±Àº
°íºÐÇØ´É CCD ºñµð¿À Ä«¸Þ¶ó¿¡ ÀÇÇØ ¼öÁýµÈ´Ù. »ùÇÃÀº Àü¸é¿¡ ÀÖ´Â
À©µµ¿ì¸¦ ÅëÇؼ µé¿©´Ù º¼ ¼ö ÀÖÀ¸¸ç ¸ð´ÏÅÍ¿¡¼ µ¿È»óÀ» º¸¸é¼
5ÃàÀ» ÀÚÀ¯·ÎÀÌ Á¶Á¤ÇÒ ¼ö ÀÖ´Ù. »ùÇÃÀ» Àû´çÇÑ À§Ä¡¿¡ ³õÀ» ¼ö
ÀÖµµ·Ï Á¶ÀÌ ½ºÆ½À¸·Î ÄÜÆ®·ÑµÇ´Â manipulator¿¡´Â x, y, z, rotation, tilt
±â´ÉÀÌ µé¾î ÀÖ´Ù. x-ray È»óÀº psedo 3D, edge and color enhancem-
ent, micrometry, wire sweep ¹× % void calculation°ú °°Àº ºñµð¿À ÇÁ·Î¼¼½Ì
½Ã½ºÅÛÀ» »ç¿ëÇÏ¿© º¸´Ù Æí¸®ÇÏ°Ô ºÐ¼®ÇÒ ¼ö ÀÖ´Ù.
100~160 kVÀÇ Àü¾ÐÀ» »ç¿ëÇÏ¿© ÀÛÀº mechanical componentÀ» Æ÷ÇÔÇÏ¿© turbine
blades, castings, ÀüÀÚ ºÎÇ°, hybrids ¹× assemblies, ¿ëÁ¢ »óÅ µîÀ» ½±°Ô
°Ë»çÇÒ ¼ö ÀÖ´Ù. 5 ¹ÌÅ©·ÐÀÇ Æ÷Ä¿½º¸¦ °®°í ÀÖ´Â UltraFocus Ÿ°ÙÀº IC
bond wire¸¦ °Ë»çÇÏ´Â °æ¿ì 100¹è±îÁö È®´ë°¡ °¡´ÉÇϸ鼵µ ¼±¸íÇÑ
È»óÀ» ¸¸µé¾î ³½´Ù.
Àåºñ´Â ¼Õ½±°Ô ¼³Ä¡ÇÒ ¼ö ÀÖÀ¸¸ç x-ray source, Ÿ°Ù ¹× Çʶó¸àÆ®´Â
»ç¿ëÀÚ°¡ °£´ÜÈ÷ ±³Ã¼ÇÒ ¼ö ÀÖ´Ù. PANTAK°ú ¿¥ÄÉÀ̾¾¿¡¼´Â »ç¿ëÀÚ°¡
Àåºñ¸¦ ´É¼÷ÇÏ°Ô »ç¿ëÇϴµ¥ ÇÊ¿äÇÑ ÃæºÐÇÑ ±³À°À» Á¦°øÇϸç
ÀåºñÀÇ ¼ö¸íÀÌ ´ÙÇÒ¶§±îÁö ÇÊ¿äÇÑ ¼ºñ½º¸¦ Á¦°øÇÑ´Ù.
¸¶ÀÌÅ©·Î Æ÷Ä¿½º X-rayÀÇ Àû¿ë
IC's and Discretes: package voids, bond defects
Hybrids: die attach voids, lid seals
PC Board Assembly: solder joints, misregistration, multi-layers
Engineering Applications: ceramic components, flyback transformers
Turbine Blades: overdrills, lead edge, trailling edge
Small castings: microporosities/voids, shrinkage, inclusions
Small welded assembly: weld lntegrity, cracks |
¸ðµ¨
BenchtopÀÇ ÁÖ¿ä »ç¾ç
· Æ©ºê Àü¾Ð: 30 to 100 kV, 125 kV ȤÀº 160 kV
· ºö Àü·ù: 1mA ÃÖ´ë
· X-ray Àü¿ø: ÃÖ´ë
60 W
· Ÿ°Ù: Indexable tungsten ·
Æ÷Ä¿½º »çÀÌÁî: 5 ¥ìm ȤÀº 10 ¥ìm ·
È®´ë ±â´É: ÃÖ´ë 100¹è
· X-ray ÄÜÆ®·Ñ À¯´ÏÆ®: ¼öµ¿ ȤÀº RS232¸¦ »ç¿ëÇÏ¿©
kV, mA, beam focus ¹× alignment¸¦ °³º°ÀûÀ¸·Î Á¶Àý
· È»ó ½Ã½ºÅÛ: °íºÐÇØ´É 14ÀÎÄ¡ Èæ¹é ¸ð´ÏÅÍ
· Manipulator: Á¶ÀÌ
½ºÆ½À¸·Î 5Ãà Á¤¹Ð Á¶Á¤
· À̵¿ °Å¸®: XÃà: 200 mm, YÃà: 200 mm, ZÃà:
500 mm, 360 ¡Æ ȸÀü,
+/- 30 ¡Æ tilt
· ijºñ³Ý: ³ôÀÌ: 930 mm, Æø: 950 mm, ±íÀÌ:
650 mm
· ¿É¼Ç: ºñµð¿À
ÇÁ¸°ÅÍ/VCR, Heavy Duty cart
· ºñµð¿À ÇÁ·Î¼¼½Ì ½Ã½ºÅÛ(¿É¼Ç): Pseudo 3D, Edge &
Color Enhancement, Micrometry, Wire sweep and % void
calculation |